|
PureGuard™ Wall Mount Heated Getter gas purifiers provide parts-per-billion (ppb) purity for nitrogen, argon, helium and other rare gases. The reactive zirconium alloy metal in our getter purifiers irreversibly remove all oxide, carbide and nitride impurities. And, the Wall Mount purifiers are the only method to remove nitrogen and methane impurities from rare gases.
The zirconium getter operates on the bulk diffusion principle to provide outstanding capacity to retain impurities. This large capacity provides long lifetimes because it uses the entire getter media, unlike ambient catalytic purifiers which use only the surface area as active removal sites. This capacity to hold more impurities and remove a broader range of impurities makes it an excellent choice when compared to ambient catalytic purifiers.
JM offers both heated getter and regenerable catalytic purifiers so that you can select the best option for your application. Typical applications include argon purifiers for silicon and photovoltaic thin-film processes, crystal growth, nitrogen purifiers for MOCVD purge gas and nitrogen or argon gas purifiers for calibration gas for analytical instrumentation.
If you need an argon purifier that provides the purest argon with no oyxgen, carbon or nitrogen impurities, then the Wall Mount argon purifiers are the perfect solution.
Learn more about Heated Getter Purifier Technology in our Library
 |
PureGuard Wall Mount I and II – 0-75 slpm
The Wall Mount I is our most basic system with the necessary features to provide < 1 ppb outlet purity. Manual inlet & outlet valves are mounted with the purifier vessel on a solid back plate to facilitate easy mounting.
The Wall Mount II purifier adds an enclosure with automatic internal bypass valves and additional alarm capabilities for local and remote monitoring.
| Key Features | | Gases purified | Nitrogen, argon, helium and other rare gases | | Purity | < 1 ppb O2, H2O, CO, CO2, N2, H2, THC | | Filtration | 0.003µm outlet metal filter | | Max pressure | 250 psig | | Power | 120VAC or 220VAC | | Pneumatic pressure |
80-100 psig (4.8-6.9 bar) min/max (Wall Mount II only) | | | | |
| Model | Description | Features | Gas | Max Flow Rate | | WMA-I-1000 | Wall Mount I Heated Getter Purifier | Manual inlet & outlet valves | Argon, rare gases | 30 slpm | | WMN-I-1000 | Wall Mount I Heated Getter Purifier | Manual inlet & outlet valves | Nitrogen | 30 slpm | | WMA-I-2000 | Wall Mount I Heated Getter Purifier | Manual inlet & outlet valves | Argon, rare gases | 50 slpm | | WMN-I-2000 | Wall Mount I Heated Getter Purifier | Manual inlet & outlet valves | Nitrogen | 50 slpm | | WMA-II-2000 | Wall Mount II Heated Getter Purifier | Automatic inlet, outlet & bypassvalve, safety enclosure | Argon, rare gases | 75 slpm | WMN-II-2000
| Wall Mount II Heated Getter Purifier | Manual inlet & outlet valvesvalve, safety enclosure | Nitrogen | 75 slpm |
Data Sheet: Wall Mount I and II
Pressure Drop Curve: Wall Mount II
Dimensional Drawings: Wall Mount I | Wall Mount II
Technical Articles:
PureGuard Wall Mount III – 20-100 slpm
|
The Wall Mount III purifier offers more features to handle flow rates up to 100 slpm typical of high-production semiconductor and PV fabs or ICP-MS instruments. This purifier includes an auto bypass, flowmeter and PLC with menu-driven display in a compact enclosure.
The purifier also includes a real-time end-of-life monitoring system to provide continuous display of remaining lifetime. The system monitors total gas flow correlated with inlet impurity levels and displays a ‘gas gauge’ type image to alert you when it is time to replace the getter vessel. Other competitive purifier detection methods are not accurate due to channeling and uneven breakthrough of impurities. The End-of-Life monitor from JM gives you confidence that monitoring is continuous and accurate.
| Key Features | | Gases purified | Nitrogen, argon, helium and other rare gases | | Purity | < 1 ppb O2, H2O, CO, CO2, N2, H2, THC | | Filtration | 0.003µm outlet metal filter | | Max pressure | Max pressure: 250 psig | | Power | 120VAC or 220VAC | | Pneumatic pressure | 60-70 psig (4.1-4.8 bar) min/max
| | Operation | PLC with menu-driven display | | Mounting | Wall or surface mounting | |  | | | |
| Model | Max Flow | Gas | Voltage | Pneumatic Pressure
| | WMA-III-3000 | 100 slpm | Ar, He, rare gas | 208-240 VAC 50/60 Hz | 60-70 psig min/max | | WMN-III-3000 | 100 slpm | N2 | 208-240 VAC 50/60 Hz | 60-70 psig min/max |
Data Sheet: Wall Mount III
Pressure Drop Curve: Wall Mount III
Dimensional Drawings: Wall Mount III
Technical Articles:
|